Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.
Material type:
TextPublication details: Sunset Beach, Calif. : Lattice Press, c1986-c1995. Description: 3 v. : ill. ; 25 cmISBN: 0961672137 (cover : v. 1); 0961672145 (v. 2)Subject(s): Semiconductors -- Etching | Integrated circuits -- Very large scale integration | SiliconDDC classification: 621.381/73 LOC classification: TK7874 | .W635 1986
Incomplete contents:
v. 1. Process technology -- v. 2. Process integration -- v. 3. The submicron MOSFET.
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode |
|---|---|---|---|---|---|---|
| Book | UDOM Library - Collection of Informatics and Virtual Education | TK7874 .W635 1986 (Browse shelf(Opens below)) | 1-3 | Available | 8094 | |
| Book | UDOM Library - Collection of Informatics and Virtual Education | TK7874 .W635 1986 (Browse shelf(Opens below)) | 2-3 | Available | 16268 | |
| Book | UDOM Library - Collection of Informatics and Virtual Education | TK7874 .W635 1986 (Browse shelf(Opens below)) | 3-3 | Available | 164868 |
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| TK7874 .V56 vol. 22 VLSI reliability / | TK7874 .V564 1988 VLSI specification, verification, and synthesis / | TK7874 .W48 1987 Relaxation techniques for the simulation of VLSI circuits / | TK7874 .W635 1986 Silicon processing for the VLSI era / | TK7874 .W635 1986 Silicon processing for the VLSI era / | TK7874 .W635 1986 Silicon processing for the VLSI era / | TK7874.6 .R66 1996 Quick-turnaround ASIC design in VHDL : core-based behavioral synthesis / |
Includes bibliographies and indexes.
v. 1. Process technology -- v. 2. Process integration -- v. 3. The submicron MOSFET.

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