Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.

By: Wolf, Stanley, 1943-Contributor(s): Tauber, Richard N Material type: Text

TextPublication details: Sunset Beach, Calif. : Lattice Press, c1986-c1995. Description: 3 v. : ill. ; 25 cmISBN: 0961672137 (cover : v. 1); 0961672145 (v. 2)Subject(s): Semiconductors -- Etching | Integrated circuits -- Very large scale integration | SiliconDDC classification: 621.381/73 LOC classification: TK7874 | .W635 1986

Incomplete contents:

v. 1. Process technology -- v. 2. Process integration -- v. 3. The submicron MOSFET.

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Holdings
Item type	Current library	Call number	Copy number	Status	Barcode
Book	UDOM Library - Collection of Informatics and Virtual Education	TK7874 .W635 1986 (Browse shelf(Opens below))	1-3	Available	8094
Book	UDOM Library - Collection of Informatics and Virtual Education	TK7874 .W635 1986 (Browse shelf(Opens below))	2-3	Available	16268
Book	UDOM Library - Collection of Informatics and Virtual Education	TK7874 .W635 1986 (Browse shelf(Opens below))	3-3	Available	164868

Includes bibliographies and indexes.

v. 1. Process technology -- v. 2. Process integration -- v. 3. The submicron MOSFET.

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